Large Sample SPM
Large Sample SPM
- Samples up to 4” diameter
- Sub system option
- Fab line compatible
- True pA STM
- Improved dI/dV spectroscopy
- Beam deflection AFM
- ‘QPlus sensor’ AFM
Omicron SPM’s are well established in many research labs for Scanning Probe Microscopy. The Large Sample SPM arises from the famous Variable Temperature SPM and offers an ideal platform for Scanning Probe Microscopy on larger samples, wafers up to 4” diameter or customized samples.
Integration & Bolt-on Concept
The bolt-on concept ensures that the Large Sample SPM is easily integrated into industrial or research MBE and wafer production lines. The Large Sample SPM uses an internal spring suspension with eddy current damping and is housed in a specially designed chamber. This chamber can be mounted directly to an existing vacuum system.
For applications in which critically high vibration levels are encountered, such as MBE systems with large mechanical pumps or cryogenic pumps in operation, a subsystem solution is available with high performance vibration decoupling mechanisms.
Sample and Tip Transfer
The Large Sample SPM features customised sample handling to suit almost any chamber geometry. A linear motion drive moves the sample into the SPM chamber, where it is transferred to the loading device and lowered onto the microscope stage ready for imaging.
STM (Large Sample STM):
The Large Sample STM utilises a scanned tip design with a single tube scanner which has a scan range (xyz) of 12 μm × 12 μm × 1.5 μm. The tips are exchangeable in-situ. The first I/V conversion stage is located in-situ, close to the scanner in order to achieve the best signal-to-noise ratio and optimal performance.STM & AFM (Large Sample AFM)
The Large Sample AFM is an atomic force microscope with beam deflection detection and a scanned tip design. The single tube scanner has a scan range (xyz) of 10 μm × 10 μm × 1.5 μm.
It uses remote controlled mirror motors for beam adjustment and a position sensitive photo diode detector. Operation modes include contact mode with normal force/lateral force detection and non-contact modes (i.e. NC-AFM, SKPM, EFM, MFM). The Large Sample AFM also includes STM detection with the first I/V conversion stage in-situ, located close to the scanner in order to achieve best signal-to-noise ratio and optimal performance.
The scanner is mounted on an independent, orthogonal, and guided 3D coarse positioning device with 10 mm × 10 mm × 10 mm travel in xyz direction. An upgrade for QPlus AFM is available.
QPlus AFM (optional)
The QPlus sensor is based on a quartz tuning fork and a new approach for non-contact atomic force microscopy. Due to the stiffness of the QPlus sensor (spring constant ~ 1800 N/m), it can be operated with smaller oscillation amplitudes compared to conventional cantilevers.
The sensor is also useful for AFM navigation of an STM tip and subsequent STM imaging and spectroscopy. Due to the stiffness and the use of solid metal tips, stable STM operation can be achieved using the Q-Plus sensor. The QPlus sensor is therefore ideal for the inclusion in STM‘s, and also as a complementary sensor for beam deflection instruments.